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Fundamentals of Microfabrication: The Science of Miniaturization, Second Edition, by Marc J. Madou
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MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world.
A bestseller in its first edition, Fundamentals of Microfabrication, Second Edition reflects the many developments in methods, materials, and applications that have emerged recently. Renowned author Marc Madou has added exercise sets to each chapter, thus answering the need for a textbook in this field.
Fundamentals of Microfabrication, Second Edition offers unique, in-depth coverage of the science of miniaturization, its methods, and materials. From the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering, it provides the background, tools, and directions you need to confidently choose fabrication methods and materials for a particular miniaturization problem.
New in the Second Edition
- Sales Rank: #1266828 in Books
- Brand: Brand: CRC Press
- Published on: 2002-03-13
- Original language: English
- Number of items: 1
- Dimensions: 1.87" h x 8.80" w x 11.32" l, 1.10 pounds
- Binding: Hardcover
- 752 pages
- Used Book in Good Condition
Review
The Fundamentals of Microfabrication describes the science of miniaturization, which demonstrates ways of making devices using smaller and smaller materials. This book brings an understanding of manufacturing options, material choices, and size...This book is well written and very informative for anyone interested in this area of engineering and could be used in an advanced course for the study of microfabrication.
-Diane Kauzlarick, EET
About the Author
University of California, Irvine, USA
Most helpful customer reviews
0 of 1 people found the following review helpful.
good
By Kwon, Jiseok
good!! very useful to me!!!
I want to recommend this product to my friends.
the color is very great apparently.
8 of 13 people found the following review helpful.
honey HE(Marc J. Madou) shrunk the world....
By Diego Radzinschi
Nanotechnology and MEMS are among the active research areas world and will continue to be so during the next decade and paving way to new generation of taking an insight into micro world making this work "Fundamentals of Microfabrication" an important stepping stone for the better future. Marc J. Madou is internationally recognized expert on sensors and sensor instrumentation who is also a leading authority on nanotechnology and microfabrication. This book will functions hand book for beginners. This book helps you explore the world of micromachines and miniaturization. The Ten chapters cover in detail, topics explaining the methodogy of microfabrications including micromachining technologies available today. Comparision of traditional and non-traditional microfabrication tools for different applications. The book also provides discussion about quantum structures and reviews molecular engineering. Appendices offer valuable information in an easily accessible format. Hyperlinked documents are provided for futher exploring the world of micromachining and microfabrication.
1 of 2 people found the following review helpful.
Reference Resource
By B. T. Price
Comprehensive in-depth reference tool - this is how the book has been characterized by a university professor using it for his course instruction. I concur. Amazing amount of practical detail in one refernce. Dimensionally a bit large and gangly but likely would require mulitple volumes if in standard book size. The web page link is a nice feature given the fast moving topic. Cleanroom reference is out of date and could be updated given the reference focus. Text discusssions well written and unusually pleasant to read.
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